This measuring microscope has one of the highest XY measuring accuracies at 0,9+3L/1000 μm.
The Hyper MF-B/MF-UB offers you the following benefits:

• One of the highest XY measuring accuracies in the world (0,9+3L/1000)¹ μm
• Selectable LAF (Laser Auto Focus) function.
• High operability and repeatability.
• Three-axis motorized control.
• You are offered the power-drive auto focus unit as standard.
• A range of useful fixtures is available that includes a wafer holder and swivel-centre support.

^{1. (L = measured length (mm) in XY plane, stage unloaded).}